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摘要
This work focuses on the fabrication and response of dipole antenna-coupled metal-oxide-metal diode detectors to long-wave infrared radiation. The detectors are fabricated using a single electron beam lithography step and a shadow evaporation technique. The detector's characteristics are presented, which include response as a function of incident infrared power and polarization angle. In addition, the effect of dipole antenna length on detection characteristics for 10.6 mu m radiation has been measured to determine resonant lengths. The response of the detector shows a first resonance at a dipole length of 3.1 mu m, a second resonance at 9.3 mu m, and third at 15.5 mu m. The zeros intermediate to the resonances are also evident.
- 出版日期2010-5
