Black poly-silicon: A nanostructured seed layer for sensor applications

作者：Fekete Z^*; Horvath A Cs; Berces Zs; Pongracz A

来源：Sensors and Actuators A: Physical , 2014, 216: 277-286.

DOI：10.1016/j.sna.2014.05.030

• Si nanograss
• Black-silicon
• Si nanopillar
• Si nanorod
• Si whiskers
• Black poly-silicon

Nanostructured silicon surfaces like black-silicon (b-Si) are of great interest in current sensor technology. This paper presents an alternative method to fabricate b-Si in poly-silicon thin film prepared on pre-deposited insulation layer in order to open new door to the integration of silicon nanograss in biosensor application as sensing or seed layer. In our experiment, black poly-silicon (BPS) is formed in LPCVD deposited poly-silicon thin film by deep reactive ion etching (DRIE) at cryogenic temperature in SF6 + O-2 plasma. Etching parameters like temperature, O-2 flow and RF power is varied and morphology of the resultant thin film is analyzed by scanning electron microscopy. The fabricated samples are subjected to a comparative investigation, which contained pillar density, directionality, etch rate and loading effects. The effect of the grain size of poly-silicon layer is analyzed and compared to samples micromachined in single-crystalline silicon (c-Si). We found that fabrication parameters of BPS morphology significantly differ from that of conventional b-Si realized in c-Si substrate. A simple application example of our BPS layer for increasing specific surface area of potential sensors is also demonstrated. As far as we know, this is the first demonstration and systematic study of b-Si fabrication in poly-silicon thin film.

• 出版日期2014-9-1