Microfabrication of Carbon Structures by Pattern Miniaturization in Resorcinol-Formaldehyde Gel

作者：Sharma Chandra S; Verma Ankur; Kulkarni Manish M; Upadhyay Devendra K; Sharma Ashutosh^*

来源：ACS Applied Materials & Interfaces, 2010, 2(8): 2193-2197.

DOI：10.1021/am100512c

• carbon
• microfabrication
• patterning
• miniaturization
• resorcinol-formaldehyde gel

A simple and novel method to fabricate and miniaturize surface and subsurface microstructures and micropatterns in glassy carbon is proposed and demonstrated. An aqueous resorcinol formaldehyde (RF) sol is employed for micromolding of the master pattern to be replicated, followed by controlled drying and pyrolysis of the gel to reproduce an isotropically shrunk replica in carbon. The miniaturized version of the master pattern thus replicated in carbon is about I order of magnitude smaller than original master by repeating three times the above cycle of molding and drying. The microfabrication method proposed will greatly enhance the toolbox for a facile fabrication of a variety of carbon-MEMS and C-microfluidic devices.

• 出版日期2010-8