Flexible, electrostatic microfluidic actuators based on thin film fabrication

作者:Patrascu Mihai; Gonzalo Ruiz Javier*; Goedbloed Martijn; Brongersma Sywert H; Crego Calama Mercedes
来源:Sensors and Actuators A: Physical , 2012, 186: 249-256.
DOI:10.1016/j.sna.2012.03.006

摘要

Active microfluidic components are required in many lab-on-a-chip applications, for handling tiny amounts of liquids on the platform. The work presented here reveals an electrostatic microfluidic actuators that can be fabricated with thin film process technology, and is based on flexible, biocompatible materials. We have successfully characterized microvalves for both the static and dynamic mode, using non-polar fluids. A

  • 出版日期2012-10