Doping mechanism of Al-Sc Co-doped ZnO transparent conductive thin films

作者：Chen Jianlin; Chen Jian; He Jianjun; Ren Yanjie; Qiu Wei; Chen Zhenhua

来源：Journal of the Chinese Ceramic Society, 2011, 39(7): 1112-1117.

• Al-doped ZnO
• Amorphous phase
• C-axis-preferred orientation
• Co-doped ZnO
• Crystallinities
• Doping mechanism
• Electrical conductivity
• Grain size
• Grain surface
• Transmission spectrums
• Transmittance spectra
• Transparent conductive oxides
• Transparent conductive thin films

Al-Sc co-doped ZnO transparent conductive thin films were prepared by sol-gel method. The crystallinity, grain boundaries, ultraviolet-visible transmittance spectra and Hall effect were investigated and the doping mechanism was discussed. The results show that when Sc is doped alone, the grain size is decreased and the crystallinity is significantly degraded with an amorphous phase on the grain surface; there is a large absorption valley in transmission spectrum and the films show no electrical conductivity. As for Al-Sc co-doped ZnO films, the c-axis-preferred orientation and the grain boundaries are greatly improved with no amorphous phase on the grain surface; there is no large absorption valley in transmission spectrum and the carrier mobility is raised by one order of magnitude compared with Al-doped ZnO film.

• 出版日期2011