A Micro Pump Driven by a Thin Film Permanent Magnet

作者：Zhi Chao^*; Shinshi Tadahiko; Uehara Minoru

来源：Journal of Advanced Mechanical Design Systems and Manufacturing, 2012, 6(7): 1180-1189.

DOI：10.1299/jamdsm.6.1180

• Valveless Micro Pump
• Thin Film Permanent Magnet
• Diffuser
• Electromagnetic Actuation
• Square Wave Signal

A valveless micro pump, utilizing a multi-layer thin film NdFeB/Ta permanent magnet (TFPM), is presented. The micro pump consists of a diaphragm actuator, comprising a TFPM, 6 mu m in thickness and 3 mm in diameter, which is bonded to a membrane made of polydimethylsiloxane (PDMS) of about 80 mu m in thickness, together with a pump chamber and a pair of diffuser elements. TFPM is sputtered on a 50 mu m thick Nb sheet. The diffuser elements are used to generate a one-way fluid flow. The chamber is made of acryl plates. UV negative film resist is used to bond the different layers. Compared to sinusoidal driving signal with same amplitude, a square driving signal can generate a higher flow rate. Applying a square wave voltage, +/- 7.5V in amplitude, the pump flow rate attains 130 mu L/min at a frequency of 15Hz. The flow rate is highly dependent on frequency and driving signal type. Diaphragm displacement, pump frequency is measured and analyzed.

• 出版日期2012