Aligned single-walled carbon nanotube patterns with nanoscale width, micron-scale length and controllable pitch

作者：Li, Sai^*; Liu, Ningyi; Chan-Park, Mary B.; Yan, Yehai; Zhang, Qing

来源：Nanotechnology, 2007, 18(45): 455302.

DOI：10.1088/0957-4484/18/45/455302

• FIELD-EFFECT TRANSISTORS
• AC DIELECTROPHORESIS
• ROOM-TEMPERATURE
• NANOWIRE
• ARRAYS
• FLOW
• PERFORMANCE
• FABRICATION
• DEPOSITION
• MANIPULATION

We have successfully aligned single-walled carbon nanotubes (SWNTs) in patterns with nanoscale width, micron-scale length and controllable pitch on SiO2/Si substrates using a poly(dimethysiloxane) (PDMS) microchannel mold. The microchanneled mold was patterned with a funnel-shaped channel to minimize nanotube jamming during capillary-driven inflow. Two (i.e.pre- and post-capillary) gas blows were employed to improve nanotube alignment. The fluidically pre-aligned carbon nanotubes were 'gas-spun' into a long 20 nm wide pattern, significantly narrower than the fluidic pre-alignment channel. These narrow and long aligned SWNT patterns were successfully transferred to a pair of gold electrodes spaced 15 mu m apart. The performance of the carbon nanotube field effect transistor (CNTFET) fabricated by this technique was evaluated.

• 出版日期2007-11-14
• 单位四川大学