Design and singular perturbation control of a piezotube-based nanomanipulator

作者：Landolsi F; Ghorbel F H^*

来源：Nonlinear Dynamics, 2016, 83(1-2): 971-981.

DOI：10.1007/s11071-015-2381-x

• Nanomanipulation
• Singular perturbation
• Design
• Control
• Piezotube

The need for more sophisticated fabrication techniques and better performing materials is relevant to several fields. Tackling this problem from a bottom-up perspective is currently an active field of research. At this time, the best candidate to achieve smart nanomanipulation is through probe-based nanofabrication. However, a major limitation of existing nanomanipulation systems is the constrained motion and maneuver of the probe. In this paper, we propose a new design of an AFM probe suitable for nanomanipulation. The design relies on active elements that improve the sensing and actuation capabilities of the AFM as a nanomanipulator. In addition, a piezopatch is attached to the cantilever to be able to tune its stiffness in situ. Design considerations and path tracking performance of the proposed probe are analyzed.

• 出版日期2016-1