All solid state pulse excitation source for kHz excimer laser

作者：Wang, Qingsheng; You, Libing; Yu, Yinshan; Zhao, Jiamin; Fang, Xiaodong^*

来源：High Power Laser and Particle Beams, 2013, 25(4): 885-889.

DOI：10.3788/HPLPB20132504.0885

• All-solid-state
• Discharge voltages
• High repetition rate
• High voltage pulse
• Magnetic pulse compressions
• Magnetic switches
• Solid-state pulsed power
• Transfer efficiency

Due to the constraint of thyratron life, thyratron-based excimer lasers are not available in some situation where high repetition rate is desired, such as in the ophthalmic treatment equipment. We designed a solid state pulsed power module (SSPPM) based on two-stage magnetic pulse compression technology, which uses solid-state switches and magnetic pulse compression to generate a high-voltage pulse of 0.1 microseconds. In discharging on the 193 nm ArF excimer laser, the rise time of the obtained excitation pulse is about 90 ns, the discharge voltage is 16.5 kV, the repetition rate is up to 1 kHz, and the overall transfer efficiency of two-stage magnetic pulse compression switches is 59.1%.

• 出版日期2013-4