科研之友
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摘要
Considering the buffer layer and electrodes, we set up a piezoelectric multilayered cantilever model to evaluate the dynamic performance of the micro-cantilevered piezo-actuator (MCPA) based on Euler-Bernoulli beam theory without considering the residual stresses on the MCPA. Adopting the material and geometric parameters of the previous MCPAs with the different lengths, the first-mode resonance frequency-beam length, the tip deflection-voltage and harmonic response curves are simulated by using the traditional and proposed models, and the results based on the proposed model are much closer to the experimental and finite element simulation results than those based on the traditional model, indicating that the proposed model is valid for evaluating the actuation performances of the MCPA. The effect of the mechanical damping and bending stiffness on the actuation performance of the MCPA is also discussed. Using the proposed model, the dependences of the first-mode resonance frequency and tip deflection of the MCPA on non-piezoelectric layer thicknesses are analyzed at the certain driving voltage. The above-mentioned methods and conclusions can be used for the structure optimized design and performance improvement of MCPAs.
