科研之友
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摘要
A microelectromechanical system is created that has the form of a cantilever-fitted microbar with a cross-sectional area of several square micrometers. The system is formed by applying epitaxial AlGaAs layers on the GaAs(001) Surface and selective chemical etching of the AlAs layer lying under the bar. Two microcantilevers that are made on the same GaAs(001) wafer and directed along the [110] and [11 (1) over bar0] orthogonal diagonal axes are studied. The static and dynamic characteristics of the systems are studied by white light optical interferometry. The deflection of the bars as a function of the applied voltage is measured in the static mode. An opposite shift of orthogonal microcantilevers on which the same voltage is applied is considered as direct evidence of the efficiency of a piezoeffect-based microengine. The calculated parameters of the microelectromechanical system, the sensitivity and eigenfrequency, are in good agreement with the measurements.
- 出版日期2009-10
