Size-controlled growth of well-aligned ZnO nanorod arrays with two-step chemical bath deposition method

作者：Yang L L^*; Zhao Q X; Willander Magnus

来源：Journal of Alloys and Compounds, 2009, 469(1-2): 623-629.

DOI：10.1016/j.jallcom.2008.08.002

• ZnO nanorods
• Chemical bath deposition
• Optical properties

Well-aligned ZnO nanorod arrays (ZNAs) with different sizes in diameter were fabricated on Si substrates by two-step chemical bath deposition method (CBD), i.e. substrate pre-treatment with spin coating to form ZnO nanoparticles layer and CBD growth. The effects Of Substrate pre-treatments, pH, angel (theta) between substrate and beaker bottom and growth time (t) on the structure of ZNAs were investigated in detail by X-ray diffraction (XRD), field emission scan electronic microscope (SEM) and photoluminescence (PL). The results show that substrate pre-treatment, pH, theta and t indeed have great influence on the growth of ZNAs, and their influence mechanisms have been, respectively, explained in detail. The introduction of a ZnO nanoparticle layer on the substrate not only helps to decrease the diameter but also has a strong impact on the orientation of ZNAs. Under the growth condition of pH similar to 6, theta = 70 degrees and t = 2 h, the well-aligned ZnO nanorod arrays with 50 nm diameter was obtained on the pre-treated Si substrates. And only a strong UV peak at 385 nm appears in room temperature PL spectrum for this sample, which indicates that as-synthesized ZnO nanorods have a perfect crystallization and low density of deep level defects.

• 出版日期2009-2-5