A simple process for the fabrication of large-area CVD graphene based devices via selective in situ functionalization and patterning

作者：Alexeev Arseny M; Barnes Matthew D; Nagareddy V Karthik; Craciun Monica F; Wright C David^*

来源：2D Materials, 2017, 4(1): 011010.

DOI：10.1088/2053-1583/4/1/011010

• graphene
• functionalization
• humidity sensor
• graphene devices

We report a novel approach for the fabrication of micro-and nano-scale graphene devices via the in situ plasma functionalization and in situ lithographic patterning of large-area graphene directly on CVD catalytic metal (Cu) substrates. This enables us to create graphene-based devices in their entirety prior to any transfer processes, simplifying very significantly the device fabrication process and potentially opening up the route to the use of a wider range of target substrates. We demonstrate the capabilities of our technique via the fabrication of a flexible, transparent, graphene/graphene oxide humidity sensor that outperforms a conventional commercial sensor.

• 出版日期2017-3