FDTD ANALYSIS OF EMISSION FROM CAPACITOR WITH MECHANICAL MOTION

作者：Shimizu Yuhei; Hirata Akimasa^*; Kuroda Michiko

来源：Microwave and Optical Technology Letters, 2013, 55(12): 2821-2824.

DOI：10.1002/mop.27995

• unwanted emission
• microelectromechanical system
• finite-difference time-domain method

In this study, we investigate the unwanted emission from a simplified microelectro-mechanical capacitor with sinusoidal and damped motions. A finite-difference time-domain method combined with an adaptive local subcell technique is developed to analyze the field emission from the variable capacitor. First, our computational method is confirmed from the time course of the charge accumulated on the electrode. The unwanted electromagnetic wave is observed to be radiated with its amplitude being sinusoidally modulated at the frequency of the electrode motion. For a realistic motion of the variable capacitor with a damped vibration, the unwanted emission is modulated at frequencies lower than the source frequency.

• 出版日期2013-12