Nanoscale space charge generation in local oxidation nanolithography

作者：Chiesa Marco^*; Garcia Ricardo

来源：Applied Physics Letters, 2010, 96(26): 263112.

DOI：10.1063/1.3459976

• ion beam effects
• metallic glasses
• nanoporous materials
• palladium alloys
• silicon alloys
• silicon compounds

We have measured the surface potential and the space charge generated during the first stages of atomic force microscopy field-induced oxidation. Space charge densities are about 10(17) cm(-3) for oxidation times below 10 ms. In a dry atmosphere, the surface potential is negative. However, in humid air the surface potential could be either positive or negative. This effect is attributed to a screening effect of the water molecules. These results explain and support the use of local oxidation patterns as templates for building molecular architectures. They also establish the space charge build up as an intrinsic feature in local oxidation experiments.

• 出版日期2010-6-28