Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes

作者：Ashtiani Alireza Ousati^*; Jiang Hongrui

来源：Journal of Micromechanics and Microengineering, 2016, 26(1): 015004.

DOI：10.1088/0960-1317/26/1/015004

• microlens
• tunable lens
• electrowetting
• dielectric lens
• MEMS actuator
• micro optics
• focus tunable lens

In this paper, we introduce an electrode design for electrohydrodynamically actuated liquid microlenses. The effective electrode areal density radially increases which results in centering of the liquid tunable microlens with a planar device structure. A model was developed to demonstrate the centering mechanism of the liquid microlens. 3D electrostatic simulation was conducted and validity of the idea was examined. A simple fabrication process was developed that uses a surface modified SU-8 as the insulator. The focal length of the microlens was measured to vary from 10.1 mm to 5.8 mm as the voltage varied from zero to 100 V.

• 出版日期2016-1