A study of hard diamond-like carbon films in mid-frequency dual-magnetron sputtering

作者：Yu Xiang^*; Wang Cheng biao; Liu Yang; Yu De yang

来源：Diamond and Related Materials, 2006, 15(9): 1223-1227.

DOI：10.1016/j.diamond.2005.09.040

• Cr-doped DLC film
• mid-frequency dual-magnetron sputtering
• multilayered and graded structure
• properties

A series of hydrogen-free diamond-like carbon (DLC) films were deposited by a mid-frequency dual-magnetron sputtering under basic conditions of Cr and C target power density between 6 and 18 W/cm(2), bias voltage in a range of -100 V to -200 V, and a pure argon atmosphere. Microstructure, microhardness, adhesion, friction and wear properties were investigated for the DLC films to be used as protective films on cutting tools and forming dies, etc. The DLC films exhibited some combined superior properties: high hardness of 30-46 GPa, good adhesion. of critical load of 50-65 N, and friction coefficient about 0.1 in air condition. Properties of the magnetron-sputtered carbon films showed a strong dependence on flux and energy of ion bombardment during growth of the films.

• 出版日期2006-9
• 单位中国地质大学（北京）