Analysis of nonlinearities in force-to-voltage conversion in vibratory microgyroscope

作者：Niu Shaohua^*; Gao Shiqiao

来源：International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2010, 2010-03-13 to 2010-03-14.

DOI：10.1109/ICMTMA.2010.59

• Mechanical quadrature
• Mechanical quadratures
• Micro-gyroscope
• Non-Linearity
• Synchronous demodulation
• Voltage conversion

At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect. According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.

• 出版日期2010
• 单位北京理工大学