科研之友
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摘要
The material removal rate (MRR) during precision finishing/polishing is a key factor, which dictates the process performance. Moreover, the MRR or wear rate is closely related to the material/part reliability. For nanoscale patterning and/or planarization on nano-order thickness coatings, the prediction and in-process monitoring of the MRR is necessary, because the process is not characterizable due to size effects and material property/process condition variations as a result of the coating/substrate interactions. The purpose of this research was to develop a practical methodology for the prediction and in-process monitoring of MRR during nanoscale finishing of coated surfaces. Using a specially designed magnetic abrasive finishing (MAF) and acoustic emission (AE) monitoring setup, experiments were carried out on indium-zinc-oxide (IZO) coated Pyrex glasses. After a given polishing time interval, AFM indentation was conducted for each workpiece sample to measure the adhesion force variations of the coating layers (IZO), which are directly related to the MRR changes. The force variation and AE monitoring data were compared to the MRR calculated form the surface measurement (Nanoview) results. The experimental results demonstrate strong correlations between AFM indentation and MRR measurement data. In addition, the monitored AE signals show sensitivity of the material structure variations of the coating layer, as the polishing progresses.
- 出版日期2017-11
