摘要

Semiconductor chips are the most basic components of smart wearable device and other AI devices. The problem of facility layout in semiconductor fabrication is considered very important, for it will affect the cost saving and performance improvement of the key chips implanted in artificial intelligence production such as intelligent wearable devices. Facility layout problem in semiconductor fabrication is to determine the optimal placement of facilities in a multi-row particular area. In this study, we propose a mathematical model to solve multi-row facility layout problem regarded as a predefined system of discrete points to place the processing modules at different locations in semiconductor fabrication plants (i.e., semiconductor fabrication). Considering the large amounts of computation required we use particle swarm optimization (PSO) algorithm to solve the multi-row facility layout problem by minimizing the total transportation distance between the modules. The results confirm that the PSO algorithm is an effective and practical approach for solving the multi-row facility layout problem within a shorter period. The effect of the number of particles on the efficiency of the PSO algorithm is also discussed in this paper.