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摘要
The profile analysis method of 2-D X-ray diffraction was used to analyze the COSi2 film. The results show that there are evident difference between diffraction profiles from different directions of the film, which relates mainly to the space distributions of the grain size and the micro-distortion in film materials. Along the normal direction of film, the materials exhibit the maximum grain size and the minimum micro-distortion.
- 出版日期2005-5
- 单位上海交通大学
