Using the Medipix3 detector for direct electron imaging in the range 60 keV to 200 keV in electron microscopy

作者：Mir J A; Plackett R; Shipsey I; dos Santos J M F^*

来源：Journal of Instrumentation, 2017, 12(11): C11015.

DOI：10.1088/1748-0221/12/11/C11015

• Hybrid detectors
• Image filtering
• Performance of High Energy Physics Detectors

Hybrid pixel sensor technology such as the Medipix3 represents a unique tool for electron imaging. We have investigated its performance as a direct imaging detector using a Transmission Electron Microscope (TEM) which incorporated a Medipix3 detector with a 300 mu m thick silicon layer compromising of 256 x 256 pixels at 55 mu m pixel pitch. We present results taken with the Medipix3 in Single Pixel Mode (SPM) with electron beam energies in the range, 60-200 keV. Measurements of the Modulation Transfer MTF) and the Detective Quantum Efficiency (DQE) were investigated. At a given beam energy, the MTF data was acquired by deploying the established knife edge technique. Similarly, the experimental data required to determine DQE was obtained by acquiring a stack of images of a focused beam and of free space (flatfield) to determine the Noise Power Spectrum (NPS).

• 出版日期2017-11