Nanocrystalline diamond piezoresistive sensor

作者：Kulha Pavel^*; Kromka Alexander; Babchenko Oleg; Vanecek Milan; Husak Miroslav; Williams Oliver A; Haenen Ken

来源：Vacuum, 2009, 84(1): 53-56.

DOI：10.1016/j.vacuum.2009.04.023

• Nanocrystalline diamond
• Piezoresistivity
• Strain sensor

The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO(2)/Si by microwave plasma-enhanced chemical vapour deposition (CVD). The gauge factor of boron-doped NCD films was investigated in the range from room temperature up to 200 degrees C and from 0 to 5 N of the applied force. These NCD piezoresistive sensor elements are compared with a Silicon-on-insulator (SOI) based piezoresistive sensor and their high-temperature applications are discussed.

• 出版日期2009-8-25