A Compact Fourier Transform Spectrometer on a Silicon Optical Bench With an Electrothermal MEMS Mirror

作者：Wang, Wei^*; Chen, Jiapin^*; Zivkovic, Aleksandar S.^*; Tanguy, Quentin A. A.^*; Xie, Huikai^*

来源：Journal of Microelectromechanical Systems, 2016, 25(2): 347-355.

DOI：10.1109/JMEMS.2016.2522767

• Fourier transform spectroscopy
• microspectrometer
• microelectromechanical systems (MEMS)
• silicon optical bench
• electrothermal micromirror
• open-loop control

This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal microelectromechanical systems (MEMS) mirror and other optical components all integrated on a micromachined silicon optical bench with the footprint of 2 cm x 2 cm. The linear optical path difference (OPD) scan range generated by the MEMS mirror reaches up to 450 mu m, and the tilting of the mirror plate is reduced down to <+/- 0.002 degrees by using a new open-loop control method. A spectral resolution of 40 cm(-1), or 1.1 nm at 532 nm, has been achieved. The overall size of the system is reduced dramatically and the performance is improved significantly compared with the prior work. [2015-0298]

• 出版日期2016-4
• 单位上海交通大学