Non-destructive Depth Profiling of the Activated Ti-Zr-V Getter by Means of Excitation Energy Resolved Photoelectron Spectroscopy

作者：Pavluch Jiri^*; Zommer Ludomir; Masek Karel; Skala Tomas; Sutara Frantisek; Nehasil Vaclav; Pis Igor; Polyak Yaroslav

来源：Analytical Sciences, 2010, 26(2): 209-215.

DOI：10.2116/analsci.26.209

Non-evaporable Ti-Zr-V ternary getters (NEGs) were studied by means of excitation energy resolved photoelectron spectroscopy (ERXPS). We attempted a quantitative study of the in-depth redistribution of the NEG components during activation. The samples were prepared ex-situ by DC magnetron sputtering on a stainless-steel substrate. The ERXPS measurements were carried out at two incident photoelectron beam angles at energies of I 10, 195, 251, 312, 397 and 641 eV. Besides these photon energies, also standard X-ray photoelectron spectroscopy (XPS) was used at a photon energy of 1254 eV. We accumulated Ti 3s, Ti 3p, Ti 3d, V 3s, V 3p, V 3d, Zr 3p, Zr 3d, Zr 4s, Zr 4p, Zr 4d, C Is, 0 Is and O 2s photoelectron peak intensities as functions of the kinetic energies given to them. Under simplifying assumptions, Monte-Carlo calculations of the activated sample concentration profiles were performed to fit the measured spectra intensities. The results proved an in-depth redistribution of the components during the activation process. This way we also contributed to a further development of non-destructive depth profiling by electron spectroscopy techniques.

• 出版日期2010-2