Embedding NbN Nanowires Into Quantum Circuits With a Neon Focused Ion Beam

作者：Burnett J^*; Sagar J; Warburton P A; Fenton J C

来源：IEEE Transactions on Applied Superconductivity, 2016, 26(3): 1700104.

DOI：10.1109/TASC.2016.2525988

• Superconducting microwave device
• superconducting thin films
• dielectric loss
• ion beams

Parasitic two-level systems are generally present in superconducting circuits as a result of conventional fabrication and processing, and these lead to noise and loss of coherence in quantum systems. We examine the use of a Ne focused ion beam for producing nanowires integrated into superconducting circuits with a minimized density of parasitic two-level systems. We report measurements of nanowires produced by Ne focused-ion-beam milling in NbN resonators. The resonator losses increase after the nanowire is fabricated, with the Q factor decreasing by similar to 30% to similar to 10(5), which is a factor 10-100 higher than in the most closely comparable circuits previously measured. This indicates that the Ne focused ion beam is a promising route for creating superconducting-nanowire-based devices with low levels of decoherence.

• 出版日期2016-4