Diamond films by CVD, and high rate polishing at low temperature with partially molten Ce-Fe alloy

作者：Li Junjie^*; Wang Shubin; Sun Yujing; Tian Shi; Zhang Yue

来源：Rare Metal Materials and Engineering, 2007, 36(5): 933-936.

• Ce-Fe alloy
• low temperature
• high efficiency
• polishing
• CVD diamond film

A new effective technique for polishing free-standing diamond films at low temperature is proposed. The alloys (Ce-7%Fe) were smelted with rare earth metal Ce and transition metal Fe of high carbon solubility. Using the alloy, the CVD diamond films were thermal-chemically polished. The experimental results indicate that the diamond films could be polished by Ce-7%Fe at 592 degrees C, even 200 degrees C lower than the temperature used in reported rare earth polishing process. The value of Ra is decreased from 5.95 mu m to 0.69 mu m after polished at 680 degrees C for 3 hours with a high removal rate of 30 mu m/h. SEM results show that the polished diamond films become much smoother. Furthermore, the Raman spectra analyses show that the surface of diamond films have not been contaminated after polishing.

• 出版日期2007-5
• 单位北京航空航天大学