科研之友
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摘要
We are studying applications for giant magnetostrictive materials that have a nnagnetostriction of 1000 ppm or more. SmFe is a kind of giant magnetostrictive material. Though Terfenol-D is well known and has a positive magnetostriction constant, SmFe has a negative magnetostriction constant. Furthermore, the permeability of SmFe is bigger than the permeability of Tb system materials. Since its permeability is big, it is expected that the merit is also big when a sensor device is constructed using SmFe. This paper describes a SmFe thin film and introduces stress into the SmFe thin film. Next, the results of measuring the magnetic characteristics using VSM while this stress is applied are shown. It is then shown from the measured magnetic characteristics that a high-sensitivity stress sensor can be constructed using a SmFe thin film, because the differential permeability greatly changes on the SmFe thin film when tensile stress is applied. Then, the relationship between the measured pressure and the stress which is applied in the thin film is shown. Finally after creating a meander coil on the SmFe thin film, we incorporated it in a Colpitts oscillator circuit and added pressure. The results showed that the sensitivity of the pressure sensor was 2.2 MHz/kPa.
- 出版日期2013-1
