An apparatus for measuring absolute electron scattering cross sections for molecular radicals

作者：Maddern T M^*; Hargreaves L R; Bolorizadeh M; Brunger M J; Buckman S J

来源：Measurement Science and Technology, 2008, 19(8): 085801.

DOI：10.1088/0957-0233/19/8/085801

• absolute differential cross sections
• supersonic expansion
• mass spectrometer
• pyrolysis nozzle
• electron spectrometer

Electron collision cross sections for highly reactive CF(x) (x = 1-3) radicals are required to model technological plasmas. In spite of their importance to industry, experimental studies of electron interactions with CF(x) radicals are rarely reported in the literature. A new apparatus for measuring absolute elastic differential cross sections for molecular radicals is reported and a sample absolute cross section for the CF(2) radical is presented to demonstrate the application of this experiment.

• 出版日期2008-8