摘要

This paper presents a new analysis method for bridge-type amplifiers by incorporating the effect of external loads, and establishes a theoretical model to predict the input/output displacement amplification ratio based on elastic beam theory. The new analytical model indicates that the displacement amplification ratio of the bridge-type amplifiers decreases significantly in the presence of external loads, and its changing rate increases with higher external loads. The analysis method is then applied to the modeling and design of a bridge type-amplifier based nano-manipulating stage, where the guiding mechanism acts as the external load of the bridge-type amplifiers. It is shown that the new analysis method can derive more accurate model of the nano-stage, which is further verified by the finite element analysis (FEA) results. The proposed method offers a new look into the analysis and design of flexure based nano-stages for real applications.