Uniaxial 3D shape measurement using DMD grating and EF lens

作者：Jing Hailong; Su Xianyu^*; You Zhisheng; Lu Mingteng

来源：Optik, 2017, 138: 487-493.

DOI：10.1016/ijleo.2017.03.048

• 3D surface measurement
• Uniaxial measurement
• Modulation measuring profilometry
• Fringe analysis

A novel method for uniaxial 3D shape measurement using DMD grating and electronic focus (EF) lens is proposed. This measurement system introduced a new projection system which is actually a combination of EF projection lens and DMD grating. The projection system is programmable for the controlling of auto focus and grating phase shift. It is easy to be programmed that the image plane of the grating scans the measured surface vertically and meanwhile the grating phase is shifted on the measured surface. The fringe patterns, captured via a beam splitter by a CCD camera, are used for defocus evaluation to reconstruct 3D shape of the measured surface. Compared with previous achievement, the proposed measurement system is programmable, more compact and has a high flexibility because of the availability of the commercial EF lens. In this paper, modulation measuring profilometry (MMP) based on phase shifting technique is used to illustrate the effectiveness of the proposed uniaxial measurement system; The proposed setup, the principle and system calibration for MMP are detailed; The measurement results for a test plane and a workpiece with deep holes verify the validation of the proposed uniaxial 3D shape measurement method.

• 出版日期2017
• 单位四川大学