Novel Nanophase-Switching ESD Protection

作者：Lin, Lin^*; Zhang, Lijie; Wang, Xin; Liu, Jian; Zhao, Hui; Tang, He; Fang, Qiang; Shi, Zitao; Wang, Albert; Huang, Ru; Cheng, Yuhua

来源：IEEE Electron Device Letters, 2011, 32(3): 378-380.

DOI：10.1109/LED.2010.2099100

• Electrostatic discharge (ESD)
• nanocrossbar
• nanophase switching (NPS)

This letter reports the proof-of-concept results for the new nontraditional nanophase-switching electrostatic-discharge (ESD) protection mechanism and nanocrossbar ESD structures. Experiment shows good ESD switching and protection, i.e., a fast response of 100 ps, a ultralow leakage of 0.26 pA, and an ESD protection of > 267 V/mu m(2). A new dispersed local ESD tunneling model is proposed, and heterogeneous complementary metal-oxide-semiconductor integration is developed.

• 出版日期2011-3
• 单位北京大学