A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing

作者：Zhao Xin^*

来源：International Conference on Biomedical Electronics and Devices, 2015-01-12 To 2015-01-15.

DOI：10.5220/0005274101380143

• Nano-electro-mechanical Systems
• Bragg Structure Waveguide
• Mapping Sensor

This paper reports a nano-opto-mechanical mapping sensor based on Bragg structure waveguide. The pressure is measured by monitoring the output spectrum shift which is induced via mechanical deformation of the period of the Bragg structure. In experiments, it measures that the shifting of the output spectra linearly red shift under different position of the Bragg structure when the pressure is increasing. Compared with traditional optical mapping sensor based on Mach-Zehnderinterferometer, the nano-opto-mechanical mapping sensor has merits such as high sensitivity and fine resolution which are 1.55pm/kPa and 1.29kPa, respectively. The nano-opto-mechanical mapping sensor has potential applications such as highly accurate measurement of pressure waves, mass sensors array and bio-medical sensors.

• 出版日期2015
• 单位四川大学; 南阳理工学院