Determination of O-16 and O-18 sensitivity factors and charge-exchange processes in low-energy ion scattering

作者：Tellez H^*; Chater R J; Fearn S; Symianakis E; Brongersma H H; Kilner J A

来源：Applied Physics Letters, 2012, 101(15): 151602.

DOI：10.1063/1.4758699

Quantitative analysis in low-energy ion scattering (LEIS) requires an understanding of the charge-exchange processes to estimate the elemental sensitivity factors. In this work, the neutralization of He+ scattered by O-18-exchanged silica at energies between 0.6 and 7 keV was studied. The process is dominated by Auger neutralization for E-i%26lt;0.8 keV. An additional mechanism starts above the reionization threshold. This collision-induced neutralization becomes the dominant mechanism for E-i%26gt;2 keV. The ion fractions P+ were determined for Si and O using the characteristic velocity method to quantify the surface density. The O-18/O-16 sensitivity ratio indicates an 18% higher sensitivity for the heavier O isotope.

• 出版日期2012-10-8