Magnetron sputtered oxidation resistant and antireflection protective coatings for freestanding diamond film IR windows

作者：Lu F X^*; Guo H B; Guo S B; He Q; Li C M; Tang W Z; Chen G C

来源：Diamond and Related Materials, 2009, 18(2-3): 244-248.

DOI：10.1016/j.diamond.2008.09.008

• Protective coatings
• optical quality diamond films
• Oxidation resistance
• IR transmission enhancement

It is well known that the CVD diamond films start to oxidize at temperatures above 700 degrees C, which may restrict their use in high temperature oxidation environment, such as for IR windows and cutting tools. Due to its high refractive index, the maximum transmission of diamond film is limited to approximately 71%. In the present investigation, HfO(2) and Y(2)O(3) coatings were prepared by reactive magnetron sputtering of pure Hf and Y metal target in Ar+O(2) atmosphere. Adherent HfO(2) and Y(2)O(3) coatings on high optical quality diamond film samples with optimum thickness for IR transmission enhancement in 8-12 mu m and 3-5 mu m were obtained. More than 20% increase in transmission was observed for both HfO(2)/Diamond/HfO(2) and Y(2)O(3)/Diamond/Y(2)O(3) coating systems. Excellent oxidation resistance for HfO(2)/Diamond/HfO(2) and Y(2)O(3)/Diamond Y(2)O(3) coatings were demonstrated at temperatures up to 950 degrees C in oxidation environment.

• 出版日期2009-3
• 单位北京科技大学