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摘要
Purpose - The purpose of this paper is to propose a sub-pixel calibration method for a microassembly system with coaxial alignment MSCA) because traditional sub-pixel calibration approaches cannot be used in this system. Design/methodology/approach - The in-house microassembly system comprises a six degrees of freedom (6-DOF) large motion serial robot with microgrippers, a hexapod 6-DOF precision alignment worktable and a vision system whose optical axis of the microscope is parallel with the horizontal plane. A prism with special coating is fixed in front of the objective lens; thus, two parts' Figures, namely the images of target and base part, can be acquired simultaneously. The relative discrepancy between the two parts can be calculated from image plane coordinate instead of calculating space transformation matrix. Therefore, the traditional calibration method cannot be applied in this microassembly system. An improved calibration method including the check corner detection solves the distortion coefficient conversely. This new way can detect the corner at sub-pixel accuracy. The experiment proves that the assembly accuracy of the coaxial microassembly system which has been calibrated by the new method can reach micrometer level. Findings - The calibration results indicate that solving the distortion conversely could improve the assembly accuracy of MSCA. Originality/value - The paper provides certain calibration methodological guidelines for devices with 2 dimensions or 2.5 dimensions, such as microelectromechanical systems devices, using MSCA.
- 出版日期2014
- 单位北京理工大学
