Nanoimprint of a 3D structure on an optical fiber for light wavefront manipulation

作者：Calafiore Giuseppe; Koshelev Alexander; Allen Frances I; Dhuey Scott; Sassolini Simone; Wong Edward; Lum Paul; Munechika Keiko^*; Cabrini Stefano

来源：Nanotechnology, 2016, 27(37): 375301.

DOI：10.1088/0957-4484/27/37/375301

• nanoimprint lithography
• optical fiber
• 3D nanofabrication
• helium ion beam
• grayscale milling
• focus ion beam
• fiber optic sensor

Integration of complex photonic structures onto optical fiber facets enables powerful platforms with unprecedented optical functionalities. Conventional nanofabrication technologies, however, do not permit viable integration of complex photonic devices onto optical fibers owing to their low throughput and high cost. In this paper we report the fabrication of a three-dimensional structure achieved by direct nanoimprint lithography on the facet of an optical fiber. Nanoimprint processes and tools were specifically developed to enable a high lithographic accuracy and coaxial alignment of the optical device with respect to the fiber core. To demonstrate the capability of this new approach, a 3D beam splitter has been designed, imprinted and optically characterized. Scanning electron microscopy and optical measurements confirmed the good lithographic capabilities of the proposed approach as well as the desired optical performance of the imprinted structure. The inexpensive solution presented here should enable advancements in areas such as integrated optics and sensing, achieving enhanced portability and versatility of fiber optic components.

• 出版日期2016-9-16