A Precise Nanoscale Removal Process via a Convexo Convex Tool

作者：Pa P S^*

来源：Mechanics of Advanced Materials and Structures, 2014, 21(2): 165-169.

DOI：10.1080/15376494.2012.680669

• nanoscale processes
• reclaim fabrication
• convexo convex tool
• -ECM
• conductive microstructure

A method is presented that uses a newly designed convexo convex tool to precisely remove defective In2O3SnO2 conductive microstructure from the color filter surface of liquid crystal display (LCD) screens by a micro-electrochemical machining (-ECM) process at the nanometer level. There is no contact between the electrode and the screen color filter surface so scoring is avoided. The feed rate of the workpiece (screen) can be high with a consequent reduction in production cost. The high current flow used in this study allows a higher feed rate as well as promoting more effective removal. An anode with a small major axis used with a small gap between the cathode and the workpiece surface reduces the time taken for In2O3SnO2 removal. The small minor axis provides larger discharge mobility and a better removal effect. A thin cathode, or one with a small arc radius, corresponds to a higher In2O3SnO2 removal rate. An effective elliptical anode provides larger discharge mobility, a better effect, and removes the In2O3SnO2 easily and cleanly in a short time.

• 出版日期2014-2-7