Note: Development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source

作者：Thanh Hung Dinh^*; Suzuki Yuhei; Hirose Ryoichi; Hara Hiroyuki; Ohashi Hayato; Li Bowen; Dunne Padraig; O' Sullivan Gerry; Sunahara Atsushi; Higashiguchi Takeshi

来源：Review of Scientific Instruments, 2014, 85(11): 116104.

DOI：10.1063/1.4901934

We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 mu m and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.

• 出版日期2014-11