An innovative micro-diamagnetic levitation system with coils applied in micro-gyroscope

作者：Liu, Kai; Zhang, Weiping^*; Liu, Wu; Chen, Wenyuan; Li, Kai; Cui, Feng; Li, Shipeng

来源：Microsystem Technologies, 2010, 16(3): 431-439.

DOI：10.1007/s00542-009-0935-x

• ROTATING GYROSCOPE

This paper presents design, simulation, and fabrication, levitation experiment of a micro-diamagnetic levitation system with coils. This micro-system module can be applied in the micro-gyroscope system because of its stable levitation of disc. The device configuration consists of three main parts: micro-disc, stator and permanent magnet (PM). Micro-disc is stably levitated on the top of the stator and PMs due to stable diamagnetic force produced between PMs and pyrolytic graphite disc. Simulation on levitation shows the situation of diamagnetic force at the centre, and offset from centre. Finally, from the levitation experiment we can see clearly the influence on levitation height of PM thickness and micro-disc thickness. As far as micro-gyroscope is concerned, coils analysis shows relationship between rotation torque and current frequency by Ansoft Maxwell, and a rotation circuit also is designed by the authors in the end of the paper.

• 出版日期2010-3
• 单位上海交通大学