科研之友
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摘要
The characterization of a measurement instrument can be achieved by measuring a known structure or comparing the measurement results with those obtained by a reference instrument. Exact comparative measurements with instruments of different clamping arrangements are usually difficult to achieve in practice, since ambient influences, angles between the measuring object and the measuring instrument, location of the measurement field do not agree exactly. n this contribution a novel multisensor measuring system is presented, which allows to compare surface topographies measured by different sensors in a single set-up. Two commercial sensors (an AFM instrument and a confocal microscope) are used as reference measuring systems and two self-assembled sensors (a Mirau interferometer and a fiber-coupled high-speed sensor) are also included. Comparative measurements with the reference sensors allow the characterization and optimization of the self-assembled interferometers as well as the investigation of optical effects at critical measuring structures. In addition to the overall concept of the multisensor measuring system, the working principles of the sensors are explained. Based on this, surface topographies measured by the sensors are presented, demonstrating the difficulties of accurate reconstruction of the surface. With regard to the measurement results, the focus is on the Mirau interferometer and the fiber-coupled high-speed sensor.
- 出版日期2017-9
