High quality factor two dimensional GaN photonic crystal cavity membranes grown on silicon substrate

作者：Trivino N Vico^*; Ros**ach G; Dharanipathy U; Levrat J; Castiglia A; Carlin J F; Atlasov K A; Butte R; Houdre R; Grandjean N

来源：Applied Physics Letters, 2012, 100(7): 071103.

DOI：10.1063/1.3684630

We report on the achievement of freestanding GaN photonic crystal L7 nanocavities with embedded InGaN/GaN quantum wells grown by metal organic vapor phase epitaxy on Si (111). GaN was patterned by e-beam lithography, using a SiO2 layer as a hard mask, and usual dry etching techniques. The membrane was released by underetching the Si (111) substrate. Micro-photoluminescence measurements performed at low temperature exhibit a quality factor as high as 5200 at similar to 420 nm, a value suitable to expand cavity quantum electrodynamics to the near UV and the visible range and to develop nanophotonic platforms for biofluorescence spectroscopy.

• 出版日期2012-2-13