科研之友
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摘要
Comparisons of microstructural evolution and magnetic properties were made of a FeB12/Pt10/[FeB1.2/Pt1](15)/Ta5 nm multilayered structure with a FeB12/Pt10/FeBPt33/Ta5 nm co-deposited structure. The Ta capping layer was used to protect the films from oxidation. Both these samples were sputtered in the same planetary deposition system onto thermally oxidized silicon substrates. They both represent layer-by-layer deposition, with the second type of deposition having atomically fine layers, more than an order of magnitude finer than the first type. The samples were annealed at a range of times, temperatures, and vacuum conditions. X-ray diffraction (XRD), transmission electron microscopy, and alternating gradient magnetometry were employed to characterize the structural and magnetic properties, respectively. Significant differences were observed between the two types of structures. A maximum coercivity of 8.9 kOe was seen for the atomically fine multilayer, about 10% more than that for the coarse multilayer. XRD analysis confirmed that both the coarse and fine multilayers were in the L1(0) phase after annealing. Our results indicate that the co-deposited film, which is really composed of atomically fine multilayers, is superior to the coarse multilayered FeB/Pt for the formation of L1(0)-phase FePt.
- 出版日期2014-5-7
- 单位中国林业科学研究院
