Atomic layer deposition of nickel-cobalt spinel thin films

作者：Hagen D J; Tripathi T S; Karppinen M

来源：Dalton Transactions, 2017, 46(14): 4796-4805.

DOI：10.1039/c7dt00512a

Combining ALD cycles for NiO and Co3O4, (Co1−xNix)3O4 films with a wide range of electrical and magnetic properties are obtained.

• 出版日期2017-4-14