科研之友
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摘要
We report what we believe is a novel method for measuring the thickness profiles of plane parallel plates by analyzing their Haidinger fringes. When an extended monochromatic source is viewed through a similar to 1-mm-thick plate, concentric transmission-type Haidinger fringes can easily be observed. Small variations in the plate thickness result in changes in the radii of the ring fringes. In this study, we scanned 20-mm-diameter fused silica and BK7 plates while tracing a specific ring in each fringe pattern to measure the thickness profiles of the plates, achieving an uncertainty of 2 nm in the measurements of the thickness differences between two locations on each plate.
- 出版日期2017-3-1
