Analog performance of standard and uniaxial strained triple-gate SOI FinFETs under x-ray radiation

作者：Bordallo C C M^*; Teixeira F F; Silveira M A G; Martino J A; Agopian P G D; Simoen E; Claeys C

来源：Semiconductor Science and Technology, 2014, 29(12): 125015.

DOI：10.1088/0268-1242/29/12/125015

• x-ray irradiation
• multiple-gate MOSFETs (MuGFETs)
• digital and analog parameters

The influence of x-ray irradiation on the main digital and analog parameters of triple gate silicon-on-insulator FinFETs is investigated for unstrained and uniaxially strained devices. Comparing the p- and n-MuGFET response to radiation, x-rays can be more harmful for nMuGFETs than for the p-type counterparts due to the back-interface leakage current, which is generated by the positive charges trapped in the buried oxide. However, in pMuGFETs, the radiation tends to suppress the parasitic back-conduction, resulting in an improvement of the device performance.

• 出版日期2014-12