科研之友
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摘要
A high-performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost-effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 mu m. The designed disk resonator operates in an elliptic contour-mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.
- 出版日期2014-5-8
