AZO films with ultraviolet photolumineseence by pulsed laser deposition at room temperature

作者：Liu Yaodong^*; Fan Weiguang; Gu Lijuan

来源：Rare Metal Materials and Engineering, 2007, 36: 440-442.

• Al-doped
• ultraviolet photoluminescence
• pulsed laser deposition

Al-doped ZnO films (AZO) with good photoluminescence property were successfully deposited on quartz glass substrates by pulsed laser deposition (PLD) at room temperature. The films were obtained by ablating a metallic target (Zn: Al 3wt%) with various laser energy densities (1.0 similar to 2.1 J/cm(2)) in oxygen atmosphere (10Pa). The structure of the films was characterized by XRD. Ultraviolet photo luminescence centered at 359 similar to 361nm was observed in the room temperature PL spectra of the Al-doped ZnO films.

• 出版日期2007-9
• 单位长春工业大学