科研之友
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摘要
This letter presents a directional inline millimeter-wave microelectromechanical systems (MEMS) power sensor with both thermoelectric and capacitive detection elements, in order to show the power transfer direction and improve the high-power detection range. In the design, a certain percentage of the incident power is extracted by a coplanar-waveguide directional coupler, and sensed in a MEMS fixed-fixed beam for the capacitive detection and in a thermopile-based sensor for the thermoelectric detection. This power sensor offers the compatible capability with the GaAs monolithic microwave integrated circuits technology. Measured reflection and insertion losses are less than -14 and 1.3 dB at 30-36 GHz, respectively. Experiments demonstrate that the thermoelectric sensor confirms the directionality of this inline sensor for the known power level with average sensitivities of similar to 11.30 and 1.02 mu V . mW(-1) thermoelectrically at 34 GHz for two different input ports.
- 出版日期2015-4
- 单位东南大学
