Nanometer lapping technology at high speed

作者：Yang JianDong^*; Tian ChunLin; Wang ChangXing

来源：Science in China - Series E: Technological Sciences , 2007, 50(1): 27-38.

DOI：10.1007/s11431-007-2030-9

• nanometer machining
• high speed lapping
• solid abrasives
• force analyzing

In floating lapping with solid abrasives, the workpiece is taken as an isolated body. The forces that act on it are analyzed. A differential equation about the forces that act on it is set up, so the forces that act on it and its motion rule are received. Combining it with known lapping tool motion, the relative motion rule between the lapping tool and workpiece is determined too. According to the relative motion, the distribution of abrasives density is designed reasonably, which makes the lapping tool wear uniformly, which, in turn, avoids redressing the lapping tool, saves abrasives, and increases machining accuracy. Combining it with advantages in high speed lapping with solid abrasives, the low cost, high efficiency nanometer lapping at high speed is realized.

• 出版日期2007-2
• 单位长春大学